US Patent 8907259 Microwave irradiation device and microwave irradiation method
Patent 8907259 was granted and assigned to Tokyo Electron on December, 2014 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 13, 2011
Date of Patent
December 9, 2014
Patent Application Number
13231546
Patent Citations Received
•••
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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