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US Patent 8894344 Vertical wafer buffering system

Patent 8894344 was granted and assigned to Applied Materials on November, 2014 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Applied Materials

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

88943440

Patent Inventor Names

Jacob Newman0

Nir Merry0

Date of Patent

November 25, 2014

Patent Application Number

121969820

Date Filed

August 22, 2008

Patent Citations Received

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US Patent 11787634 Storage and retrieval system

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US Patent 11984335 FOUP or cassette storage for hybrid substrate bonding system

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US Patent 11893533 Storage and retrieval system

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US Patent 11745964 Storage and retrieval system transport vehicle

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US Patent 11760570 Storage and retrieval system

Patent Primary Examiner

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Jonathan Snelting

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