US Patent 8885158 Surface scanning inspection system with adjustable scan pitch
Patent 8885158 was granted and assigned to KLA-Tencor on November, 2014 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 6, 2012
Date of Patent
November 11, 2014
Patent Application Number
13413521
Patent Citations Received
Patent Inventor Names
Christian Wolters
0
Juergen Reich
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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