US Patent 8740673 CMP retaining ring with soft retaining ring insert
Patent 8740673 was granted and assigned to Strasbaugh on June, 2014 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 4, 2011
Date of Patent
June 3, 2014
Patent Application Number
13252897
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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