US Patent 8647992 Flowable dielectric using oxide liner
Patent 8647992 was granted and assigned to Applied Materials on February, 2014 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 21, 2010
Date of Patent
February 11, 2014
Patent Application Number
12974495
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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