US Patent 8563445 Conformal layers by radical-component CVD
Patent 8563445 was granted and assigned to Applied Materials on October, 2013 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 10, 2011
0
Date of Patent
October 22, 2013
0
Patent Application Number
13024487
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Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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