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US Patent 8554356 Processing end point detection method, polishing method, and polishing apparatus

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Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

8554356

Date of Patent

October 8, 2013

Patent Application Number

12311560

Date Filed

October 5, 2007

Patent Citations Received

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US Patent 12019026 Systems and methods for additive manufacturing operations

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US Patent 11858207 Defect detection for additive manufacturing systems

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US Patent 11931956 Multi-sensor quality inference and control for additive manufacturing processes

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US Patent 11965798 Endpoint detection system for enhanced spectral data collection

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US Patent 11715672 Endpoint detection for chemical mechanical polishing based on spectrometry

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US Patent 11850699 Switching control algorithms on detection of exposure of underlying layer during polishing

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