US Patent 8293068 Plasma processing apparatus
Patent 8293068 was granted and assigned to Tokyo Electron on October, 2012 by the United States Patent and Trademark Office.
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Patent Inventor Names
Chishio Koshimizu0
Shinji Himori0
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US Patent 08293068 Plasma processing apparatus US Patent 8293068 Plasma processing apparatus
Infobox
Patent Number
082930680
Patent Number
82930680
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
082930680
Date of Patent
October 23, 2012
0Patent Application Number
124109430
Date Filed
March 25, 2009
0Patent Primary Examiner
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US Patent 08293068 Plasma processing apparatus
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
08293068
Date of patent
October 23, 2012
Patent application number
12410943
Date Filed
March 25, 2009
Patent primary examiner
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