Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Atsushi Takeda
Nobuaki Tsuchiya
Tadashi Inoue
Takayuki Moriwaki
Kazunari Sekiya
Hiroshi Sasamoto
Tatsunori Sato
Masaharu Tanabe
Date of Patent
October 10, 2023
Patent Application Number
17932400
Date Filed
September 15, 2022
Patent Citations
...
Patent Primary Examiner
Patent abstract
A plasma processing apparatus includes a balun having a first unbalanced terminal, a second unbalanced terminal, a first balanced terminal, and a second balanced terminal, a grounded vacuum container, a first electrode electrically connected to the first balanced terminal, a second electrode electrically connected to the second balanced terminal, and a ground electrode arranged in the vacuum container and grounded.
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