US Patent 8218218 Fatigue resistant MEMS apparatus and system
Patent 8218218 was granted and assigned to MicroVision, Inc. on July, 2012 by the United States Patent and Trademark Office.
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Patent abstract
A microelectromechanical system (MEMS) includes a conductor with improved reliability. The conductor flexes with a moving member in the MEMS device, and the improved reliability is achieved through material selections that provides increased fatigue resistance, reduced crack propagation, and/or mechanisms for improved live at a given strain level. The conductor may include a single material, or may include layers of different materials.
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Patent Inventor Names
David Malametz0
Dean R. Brown0
Jason B. Tauscher0
John Wyatt Coy0
Mark P. Helsel0
Matthew Ellis0
Michael E. Sherwood0
Wyatt O. Davis0
Yunfei Ma0
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US Patent 08218218 Fatigue resistant MEMS apparatus and system US Patent 8218218 Fatigue resistant MEMS apparatus and system
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Patent Number
082182180
Patent Number
82182180
Edits on 21 Mar, 2023
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Is a
Current Assignee
Patent Jurisdiction
Patent Number
082182180
Date of Patent
July 10, 2012
0Patent Application Number
124204260
Date Filed
April 8, 2009
0Patent Primary Examiner
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US Patent 08218218 Fatigue resistant MEMS apparatus and system
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
08218218
Date of patent
July 10, 2012
Patent application number
12420426
Date Filed
April 8, 2009
Patent primary examiner
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