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US Patent 8218218 Fatigue resistant MEMS apparatus and system

Patent 8218218 was granted and assigned to MicroVision, Inc. on July, 2012 by the United States Patent and Trademark Office.

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Patent attributes

Current Assignee

MicroVision, Inc.

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Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Patent Inventor Names

Yunfei Ma0

David Malametz0

Dean R. Brown0

Jason B. Tauscher0

John Wyatt Coy0

Mark P. Helsel0

Matthew Ellis0

Michael E. Sherwood0

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Date of Patent

July 10, 2012

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Patent Application Number

124204260

Date Filed

April 8, 2009

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Patent Citations Received

US Patent 11952265 Actuator device

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US Patent 11939211 Actuator device

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Patent Primary Examiner

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Patent abstract

A microelectromechanical system (MEMS) includes a conductor with improved reliability. The conductor flexes with a moving member in the MEMS device, and the improved reliability is achieved through material selections that provides increased fatigue resistance, reduced crack propagation, and/or mechanisms for improved live at a given strain level. The conductor may include a single material, or may include layers of different materials.

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