US Patent 8182312 CMP system with wireless endpoint detection system
Patent 8182312 was granted and assigned to Strasbaugh on May, 2012 by the United States Patent and Trademark Office.
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Patent abstract
A CMP polishing pad with an optical sensor assembly embedded in the pad, connected to a transceiver and/or power supply mounted at the center of the pad or at the outer edge of the pad which communicates wirelessly with a control system.
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Patent Inventor Names
Michael Starman0
Randolph E. Truer0
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US Patent 08182312 CMP system with wireless endpoint detection system US Patent 8182312 CMP system with wireless endpoint detection system
Infobox
Patent Number
08182312
Patent Number
8182312
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US Patent 08182312 CMP system with wireless endpoint detection system
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
08182312
Date of patent
May 22, 2012
Patent application number
12205861
Date Filed
September 6, 2008
Patent primary examiner
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