Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Michael Starman0
Randolph E. Truer0
Date of Patent
May 22, 2012
Patent Application Number
12205861
Date Filed
September 6, 2008
Patent Primary Examiner
Patent abstract
A CMP polishing pad with an optical sensor assembly embedded in the pad, connected to a transceiver and/or power supply mounted at the center of the pad or at the outer edge of the pad which communicates wirelessly with a control system.
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