US Patent 8137465 Single-chamber sequential curing of semiconductor wafers
Patent 8137465 was granted and assigned to Novellus Systems on March, 2012 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 26, 2005
Date of Patent
March 20, 2012
Patent Application Number
11115576
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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