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US Patent 11699610 Rotational indexer with additional rotational axes

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Is a
Patent
Patent
1

Patent attributes

Patent Applicant
Lam Research
Lam Research
1
Current Assignee
Lam Research
Lam Research
1
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
1
Patent Number
116996101
Date of Patent
July 11, 2023
1
Patent Application Number
180490301
Date Filed
October 24, 2022
1
Patent Citations
‌
US Patent 9190307 Apparatus for transferring a solar wafer or solar cell during its fabrication
1
‌
US Patent 9190907 System and method of equivalent series inductance cancellation
1
‌
US Patent 9252038 Drive device and conveyance device
1
‌
US Patent 9511348 Functionalized porous organic polymers for olefin/paraffin separations
1
‌
US Patent 9511438 Solder bump forming method and apparatus
1
‌
US Patent 9797042 Single ALD cycle thickness control in multi-station substrate deposition systems
1
‌
US Patent 10109517 Rotational indexer with additional rotational axes
1
‌
US Patent 10946634 Transfer device, curing system and curing method
1
...
Patent Primary Examiner
‌
Gerald McClain
1
CPC Code
‌
H01L 21/68764
1
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B25J 9/043
1
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B25J 9/042
1
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B25J 18/007
1

A rotational indexer rotatable to move semiconductor wafers or other items between various stations arranged in a circular array. The items being moved may be supported by arms of the indexer during such movement. The rotational indexer may be further configured to also cause the items being moved to rotate about other rotational axes to cause rotation of the items relative to the arms supporting them.

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