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US Patent 11699610 Rotational indexer with additional rotational axes

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Current Assignee
Lam Research
Lam Research
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Date Filed
October 24, 2022
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Date of Patent
July 11, 2023
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Patent Applicant
Lam Research
Lam Research
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Patent Application Number
18049030
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Patent Citations
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US Patent 9190307 Apparatus for transferring a solar wafer or solar cell during its fabrication
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US Patent 9190907 System and method of equivalent series inductance cancellation
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US Patent 9252038 Drive device and conveyance device
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US Patent 9511348 Functionalized porous organic polymers for olefin/paraffin separations
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US Patent 9511438 Solder bump forming method and apparatus
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US Patent 9797042 Single ALD cycle thickness control in multi-station substrate deposition systems
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US Patent 10109517 Rotational indexer with additional rotational axes
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US Patent 10946634 Transfer device, curing system and curing method
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US Patent 11482436 Rotational indexer with additional rotational axes
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US Patent 11355367 Robot for simultaneous substrate transfer
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•••
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11699610
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Patent Primary Examiner
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Gerald McClain
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CPC Code
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H01L 21/68764
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B25J 9/043
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B25J 9/042
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B25J 18/007
0

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