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US Patent 8053700 Applicators and cooling systems for a plasma device

Patent 8053700 was granted and assigned to MKS Instruments on November, 2011 by the United States Patent and Trademark Office.

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Is a
Patent
Patent

Patent attributes

Current Assignee
MKS Instruments
MKS Instruments
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
8053700
Patent Inventor Names
Jack J. Schuss2
Xing Chen2
Date of Patent
November 8, 2011
Patent Application Number
11541388
Date Filed
September 29, 2006
Patent Citations Received
‌
US Patent 12075554 Plasma source having a dielectric plasma chamber with improved plasma resistance
1
Patent Primary Examiner
‌
Mark Paschall
Patent abstract

An improved plasma vessel (i.e., plasma applicator) that provides effective cooling includes a plurality of generally linear tubes having a dielectric interior fluidly connected together by dielectric connectors. The tubes and connectors are joined together to form a leak-tight plasma vessel. A cooling system surrounding the improved plasma vessel includes a rigid cooling plate and a deformable thermal transfer material disposed between the plasma vessel and the cooling plate. After use or at an operator's discretion, the plasma vessel can be removed from the cooling system and a new vessel may be inserted in its place. Alternatively, the used vessel may be refurbished and re-inserted into the cooling system. The new or refurbished vessel may or may not be of the same size or configuration as the used vessel. Thermal contact between the cooling system and the new or refurbished vessel, however is maintained through the deformable thermal transfer material.

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