US Patent 7977148 Method for manufacturing image sensor
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Patent abstract
A method for manufacturing an image sensor includes forming a photolithography key in a scribe lane of a first substrate over which circuitry is formed in an active region. A photodiode is formed on an active region of a second substrate. The second substrate is bonded to the first substrate such that the photodiode is electrically connected to the circuitry. The photolithography key in the scribe lane of the first substrate is opened. A pattern is formed on the active region of the bonded second substrate using the opened photolithography key on/over the first substrate.
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Patent Inventor Names
Young Je Yun0
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US Patent 07977148 Method for manufacturing image sensor US Patent 7977148 Method for manufacturing image sensor
Infobox
Patent Number
079771480
Patent Number
79771480
Edits on 24 Apr, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079771480
Date of Patent
July 12, 2011
0Patent Application Number
123402210
Date Filed
December 19, 2008
0Patent Primary Examiner
Edits on 8 Dec, 2021
Golden AI
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Infobox (+7 properties)
US Patent 07977148 Method for manufacturing image sensor
Infobox
Is a
Patent jurisdiction
Patent number
07977148
Date of patent
July 12, 2011
Patent application number
12340221
Date Filed
December 19, 2008
Patent primary examiner
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