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US Patent 7977148 Method for manufacturing image sensor

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Patent
Patent
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Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
79771480
Patent Inventor Names
Young Je Yun0
Date of Patent
July 12, 2011
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Patent Application Number
123402210
Date Filed
December 19, 2008
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Patent Primary Examiner
‌
Alexander G Ghyka
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Patent abstract

A method for manufacturing an image sensor includes forming a photolithography key in a scribe lane of a first substrate over which circuitry is formed in an active region. A photodiode is formed on an active region of a second substrate. The second substrate is bonded to the first substrate such that the photodiode is electrically connected to the circuitry. The photolithography key in the scribe lane of the first substrate is opened. A pattern is formed on the active region of the bonded second substrate using the opened photolithography key on/over the first substrate.

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