US Patent 7973930 Spectroscopic ellipsometer
Patent 7973930 was granted and assigned to Horiba on July, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 20, 2009
0
Date of Patent
July 5, 2011
0
Patent Application Number
12389707
0
Patent Inventor Names
Satoru Tanaka
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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