US Patent 7973930 Spectroscopic ellipsometer

Patent 7973930 was granted and assigned to Horiba on July, 2011 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Horiba

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

79739300

Patent Inventor Names

Satoru Tanaka0

Date of Patent

July 5, 2011

Patent Application Number

123897070

Date Filed

February 20, 2009

Patent Primary Examiner

‌

L. G. Lauchman

Patent abstract

A spectroscopic ellipsometer can compare data different in a measurement condition and facilitate setting an initial value of fitting data even for an inexperienced operator such as a beginner. The spectroscopic ellipsometer includes a reference data storage part storing therein reference data to be compared with measurement data, a conversion operation part converting the measurement data or the reference data into comparable data, so that the measurement data can be compared with the reference data, and a comparison and determination part comparing the measurement data with the reference data made comparable by the conversion operation part with each other and determining a coincidence between the measurement data and the reference data.