Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Akio Hashizume0
Date of Patent
June 14, 2011
0Patent Application Number
115488550
Date Filed
October 12, 2006
0Patent Primary Examiner
Patent abstract
According to the substrate processing method of the invention, a jet of droplets generated from a gas and a heated processing liquid is supplied to the surface of a substrate. A resist stripping liquid to strip off the resist from the surface of the substrate is then supplied to the surface of the substrate.
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