US Patent 7952071 Apparatus and method for inspecting sample surface
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Patent abstract
Provided is a defect inspection apparatus and an inspection (or evaluation) method with highly improved accuracy, which would not be provided by the prior art, in the defect inspection apparatus used in a manufacturing process of a semiconductor device.
Edits on 21 May, 2023
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US Patent 07952071 Apparatus and method for inspecting sample surface US Patent 7952071 Apparatus and method for inspecting sample surface
Infobox
Patent Number
0795207100
Patent Number
795207100
Edits on 2 Apr, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079520710
Date of Patent
May 31, 2011
0Patent Application Number
121620710
Date Filed
January 24, 2007
0Patent Primary Examiner
Edits on 24 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079520710
Date of Patent
May 31, 2011
0Patent Application Number
121620710
Date Filed
January 24, 2007
0Patent Primary Examiner
Edits on 7 Dec, 2021
Golden AI
Edits made to:
Infobox (+7 properties)
US Patent 07952071 Apparatus and method for inspecting sample surface
Infobox
Is a
Patent jurisdiction
Patent number
07952071
Date of patent
May 31, 2011
Patent application number
12162071
Date Filed
January 24, 2007
Patent primary examiner
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