Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 31, 2011
Patent Application Number
12162071
Date Filed
January 24, 2007
Patent Primary Examiner
Patent abstract
Provided is a defect inspection apparatus and an inspection (or evaluation) method with highly improved accuracy, which would not be provided by the prior art, in the defect inspection apparatus used in a manufacturing process of a semiconductor device.
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