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US Patent 7925134 Precision length standard for coherent laser radar

Patent 7925134 was granted and assigned to Nikon Metrology on April, 2011 by the United States Patent and Trademark Office.

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Patent

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Current Assignee
Nikon Metrology
Nikon Metrology
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7925134
Date of Patent
April 12, 2011
Patent Application Number
12164711
Date Filed
June 30, 2008
Patent Citations Received
‌
US Patent 11680794 Low drift reference for laser radar
0
Patent Primary Examiner
‌
Ellen Kim
Patent abstract

This disclosure presents a version of a coherent laser radar system that is immune to environmental effects on Mach-Zehnder-configured interferometers and reference length standards comprising such systems. The present disclosure also describes methods and materials which alleviate interferometer drift due to vapor absorption using a polyimide coated polarization maintaining fiber to reduce the change in the length of a reference arm.

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