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US Patent 11680794 Low drift reference for laser radar

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Is a
Patent
Patent
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Patent attributes

Patent Applicant
Nikon Metrology
Nikon Metrology
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Current Assignee
Nikon Metrology
Nikon Metrology
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
116807940
Date of Patent
June 20, 2023
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Patent Application Number
161322540
Date Filed
September 14, 2018
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Patent Citations
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US Patent 7982661 Coherent frequency modulated continuous wave radar
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US Patent 7800758 Laser-based coordinate measuring device and laser-based method for measuring coordinates
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US Patent 7925134 Precision length standard for coherent laser radar
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US Patent 8687173 Compact fiber optic geometry for a counter chirp FMCW coherent laser radar
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Patent Primary Examiner
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Samantha K Nickerson
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CPC Code
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G01S 7/491
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G01S 7/497
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G01C 3/08
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G01S 17/89
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G01S 17/34
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G01S 7/4812
0

Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.

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