Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Osamu Kasuga0
Date of Patent
March 22, 2011
Patent Application Number
11251843
Date Filed
October 18, 2005
Patent Primary Examiner
Patent abstract
A film-forming method of forming a film on a substrate includes performing a surface-improving treatment on the substrate, determining whether a predetermined amount of time has passed since the surface-improving treatment has been performed on the substrate, applying a film-forming solution to the substrate when it is determined that the predetermined amount of time has not passed, and repeating the surface-improving treatment on the substrate when it is determined that the predetermined amount of time has passed.
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