US Patent 7901969 Micromirror manufacturing method
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Patent abstract
A micro-mirror manufacturing method for dividing a plurality of micro-mirror devices each having at least one mirror, formed on a semiconductor wafer into individual micro-mirror devices can be provided. The manufacturing method comprises a step of depositing an inorganic protection layer on the mirror before separating the micro-mirror devices from the wafer and a step of removing the inorganic protection layer after separating the micro-mirror devices from the wafer.
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Patent Inventor Names
Fusao Ishii0
Hirotoshi Ichikawa0
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Official Website
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US Patent 07901969 Micromirror manufacturing method US Patent 7901969 Micromirror manufacturing method
Infobox
Patent Number
079019690
Patent Number
79019690
Edits on 27 Sep, 2022
Golden AI
Infobox
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Patent Jurisdiction
Patent Number
079019690
Date of Patent
March 8, 2011
0Patent Application Number
120045980
Date Filed
December 24, 2007
0Official Website
Patent Primary Examiner
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US Patent 07901969 Micromirror manufacturing method
Infobox
Is a
Patent jurisdiction
Patent number
07901969
Date of patent
March 8, 2011
Patent application number
12004598
Date Filed
December 24, 2007
Patent primary examiner
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