Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Fusao Ishii0
Hirotoshi Ichikawa0
Date of Patent
March 8, 2011
0Patent Application Number
120045980
Date Filed
December 24, 2007
0Patent Primary Examiner
Patent abstract
A micro-mirror manufacturing method for dividing a plurality of micro-mirror devices each having at least one mirror, formed on a semiconductor wafer into individual micro-mirror devices can be provided. The manufacturing method comprises a step of depositing an inorganic protection layer on the mirror before separating the micro-mirror devices from the wafer and a step of removing the inorganic protection layer after separating the micro-mirror devices from the wafer.
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