US Patent 7880151 Beam positioning for beam processing
Patent 7880151 was granted and assigned to FEI Company on February, 2011 by the United States Patent and Trademark Office.
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Patent abstract
An improved method and apparatus of beam processing corrects for beam drift while a beam is processing a sample. The beam position is aligned using a fiducial that is sufficiently near the working area so that the fiducial can be imaged and the sample processed without a stage moving. During processing, the beam positioning is corrected for drift using a model that predicts the drift.
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US Patent 07880151 Beam positioning for beam processing US Patent 7880151 Beam positioning for beam processing
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Patent Number
0788015100
Patent Number
788015100
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
078801510
Date of Patent
February 1, 2011
0Patent Application Number
120395350
Date Filed
February 28, 2008
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
078801510
Date of Patent
February 1, 2011
0Patent Application Number
120395350
Date Filed
February 28, 2008
0Official Website
Patent Primary Examiner
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US Patent 07880151 Beam positioning for beam processing
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07880151
Date of patent
February 1, 2011
Patent application number
12039535
Date Filed
February 28, 2008
Patent primary examiner
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