US Patent 7880151 Beam positioning for beam processing

Patent 7880151 was granted and assigned to FEI Company on February, 2011 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors Activity

Is a

Patent

Patent attributes

Current Assignee

FEI Company

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7880151

Date of Patent

February 1, 2011

Patent Application Number

12039535

Date Filed

February 28, 2008

Patent Primary Examiner

‌

Bernard E Souw

Patent abstract

An improved method and apparatus of beam processing corrects for beam drift while a beam is processing a sample. The beam position is aligned using a fiducial that is sufficiently near the working area so that the fiducial can be imaged and the sample processed without a stage moving. During processing, the beam positioning is corrected for drift using a model that predicts the drift.