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US Patent 7863095 Method of manufacturing layered chip package

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Contents

Is a
Patent
Patent
0

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
78630950
Patent Inventor Names
Hiroyuki Ito0
Satoru Sueki0
Tatsuya Harada0
Yoshitaka Sasaki0
Nobuyuki Okuzawa0
Date of Patent
January 4, 2011
0
Patent Application Number
128054460
Date Filed
July 30, 2010
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Patent Citations Received
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US Patent 12136562 3D semiconductor device and structure with single-crystal layers
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0
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US Patent 12068187 3D semiconductor device and structure with bonding and DRAM memory cells
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US Patent 12080743 Multilevel semiconductor device and structure with image sensors and wafer bonding
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US Patent 12094829 3D semiconductor device and structure
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US Patent 12094892 3D micro display device and structure
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US Patent 12094965 3D semiconductor device and structure with metal layers and memory cells
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US Patent 12120880 3D semiconductor device and structure with logic and memory
0
...
Patent Primary Examiner
‌
S. V. Clark
0
Patent abstract

A layered chip package includes a plurality of layer portions stacked, each layer portion including a semiconductor chip having a first surface with a device formed thereon and a second surface opposite thereto. The plurality of layer portions include at least a pair of layer portions disposed such that the first surfaces of the respective semiconductor chips face toward each other. A manufacturing method for the layered chip package includes the steps of: fabricating a layered substructure by stacking a plurality of substructures each including a plurality of layer portions corresponding to the plurality of layer portions of the layered chip package; and fabricating a plurality of layered chip packages by using the layered substructure. The step of fabricating the layered substructure includes: fabricating a first and a second pre-polishing substructure each having a first surface and a second surface; bonding the pre-polishing substructures to each other such that their respective first surfaces face toward each other; and forming a first and a second substructure by polishing the second surfaces.

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