US Patent 7855791 Vibration-resistant interferometric scanning system and method thereof
Patent 7855791 was granted and assigned to National Taipei University of Technology on December, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 30, 2009
Date of Patent
December 21, 2010
Patent Application Number
12413911
Patent Inventor Names
Shyh-Tsong Lin
0
Liang-Chia Chen
0
Sheng-Lih Yeh
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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