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US Patent 7855791 Vibration-resistant interferometric scanning system and method thereof

Patent 7855791 was granted and assigned to National Taipei University of Technology on December, 2010 by the United States Patent and Trademark Office.

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Patent abstract

A vibration-resistant interferometric scanning system and method are provided in the present invention. In the present invention, the brightness distribution in a high-coherence interference pattern is analyzed so as to perform a compensation action to lock the brightness distribution of a high-coherence interference pattern and consequently locking the fringe distribution of a low-coherence interference pattern or to perform a scanning operation composed of plural shifting actions with specified scanning distances in sequence and plural compensation actions to lock the fringe distribution in a low-coherence interference pattern corresponding to the surface profile of a measured object. Consequently, with the system and method of the present invention, the surface profile of a measured object disturbed by external or internal vibrations can be measured accurately and precisely.

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Patent Inventor Names
Liang-Chia Chen1
Sheng-Lih Yeh1
Shyh-Tsong Lin1
1
Type: Web page
Patent. https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7855791
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US Patent 07855791 Vibration-resistant interferometric scanning system and method thereof US Patent 7855791 Vibration-resistant interferometric scanning system and method thereof

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Patent Number
07855791
Patent Number
7855791
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=07855791
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=07855791
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 US Patent 07855791 Vibration-resistant interferometric scanning system and method thereof

Infobox
Is a
Patent
Patent
Current assignee
National Taipei University of Technology
National Taipei University of Technology
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07855791
Date of patent
December 21, 2010
Patent application number
12413911
Date Filed
March 30, 2009
Patent primary examiner
‌
Patrick J Connolly

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