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US Patent 7839223 Method and apparatus for advanced frequency tuning

Patent 7839223 was granted and assigned to ADVANCED ENERGY INDUSTRIES, INC. on November, 2010 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
Current Assignee
ADVANCED ENERGY INDUSTRIES, INC.
ADVANCED ENERGY INDUSTRIES, INC.
Date Filed
September 30, 2008
Date of Patent
November 23, 2010
Patent Application Number
12242328
Patent Citations Received
‌
US Patent 11990319 Methods and apparatus for processing a substrate
3
‌
US Patent 11804362 Frequency tuning for modulated plasma systems
‌
US Patent 11948775 Combined RF generator and RF solid-state matching network
4
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7839223
Patent Primary Examiner
‌
David Mis

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