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US Patent 7839223 Method and apparatus for advanced frequency tuning

Patent 7839223 was granted and assigned to ADVANCED ENERGY INDUSTRIES, INC. on November, 2010 by the United States Patent and Trademark Office.

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Current Assignee
ADVANCED ENERGY INDUSTRIES, INC.
ADVANCED ENERGY INDUSTRIES, INC.
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7839223
Date of Patent
November 23, 2010
Patent Application Number
12242328
Date Filed
September 30, 2008
Patent Citations Received
‌
US Patent 11990319 Methods and apparatus for processing a substrate
0
‌
US Patent 11804362 Frequency tuning for modulated plasma systems
‌
US Patent 11948775 Combined RF generator and RF solid-state matching network
0
Patent Primary Examiner
‌
David Mis
Patent abstract

A method and apparatus for tuning the operational frequency of an electrical generator coupled to a time-varying load is described. One illustrative embodiment rapidly calculates an error (reflection coefficient magnitude) at the current operational frequency of the electrical generator; adjusts the frequency of the electrical generator by an initial step size so; rapidly calculates a second error; and if the magnitude of the second error is smaller than the magnitude of the first error, then the step size is increased and the frequency is adjusted by the increased step size.

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