A method for calibrating an impedance/admittance meter for measurements of a DUT includes measuring a pure capacitance at a desired frequency; using the capacitance measurement to establish the phase response of the meter; measuring the admittance value of a resistor with the meter at the desired frequency, the resistor having a known DC conductance and being known to primarily exhibit parallel capacitive frequency dependency; and adjusting the gain of the meter to provide the known DC conductance as the real component of the admittance value.