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US Patent 7829961 MEMS microphone package and method thereof

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Is a
Patent
Patent
0

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
78299610
Patent Inventor Names
Wei-Min Hsiao0
Date of Patent
November 9, 2010
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Patent Application Number
119435990
Date Filed
November 21, 2007
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Patent Citations Received
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US Patent 11916575 Digital microphone assembly with improved mismatch shaping
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US Patent 11780726 Dual-diaphragm assembly having center constraint
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US Patent 11787690 MEMS assembly substrates including a bond layer
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US Patent 11787688 Methods of forming MEMS diaphragms including corrugations
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US Patent 11909387 Microphone with slew rate controlled buffer
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US Patent 11671775 Microphone assembly with transducer sensitivity drift compensation and electrical circuit therefor
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US Patent 11662236 Sensor package with ingress protection
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US Patent 11772961 MEMS device with perimeter barometric relief pierce
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Patent Primary Examiner
Bradley K. Smith
Bradley K. Smith
0
Patent abstract

A MEMS microphone package includes a carrier, an application specific IC, an encapsulant and a microphone chip. The application specific IC and the microphone chip are respectively disposed on first and second surfaces of the carrier, and the application specific IC and the microphone chip are electrically connected to the carrier. The encapsulant includes first and second encapsulants, the first encapsulant is formed on the first surface to seal the application specific IC, the second encapsulant is formed on the second surface to become a cavity and the microphone chip is located at the cavity. Because the application specific IC and the microphone chip are disposed on the first and second surfaces of the carrier, respectively, the second encapsulant surrounds the microphone chip, and the first and second encapsulants are formed at the same time, it can increase the structural strength of package and reduce the process.

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