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US Patent 7800734 Lighting apparatus, exposure apparatus and microdevice manufacturing method

Patent 7800734 was granted and assigned to Nikon (Somalia) on September, 2010 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
Current Assignee
‌
Nikon (Somalia)
Date Filed
September 21, 2005
Date of Patent
September 21, 2010
Patent Application Number
11660927
Patent Citations Received
‌
US Patent 11984236 Radiation system
0
‌
US Patent 11697178 Methods and apparatuses for laser processing materials
0
‌
US Patent 11713271 Device and method for cutting out contours from planar substrates by means of laser
0
‌
US Patent 11773004 Laser cutting and processing of display glass compositions
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7800734
Patent Primary Examiner
‌
Peter B. Kim

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