US Patent 7794610 Optical components and production thereof
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Patent abstract
The invention relates to a method for making an actuation system for an optical component comprising:etching of a first face of a component, to form pads on it,etching of a second face of the component, to expose a membrane made of the same material as the pads,production of the actuation means of the pads and the membrane.
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Patent Inventor Names
Claire Divoux0
Marie-Helene Vaudaine0
Thierry Enot0
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US Patent 07794610 Optical components and production thereof US Patent 7794610 Optical components and production thereof
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Patent Number
077946100
Patent Number
77946100
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Patent Jurisdiction
Patent Number
077946100
Date of Patent
September 14, 2010
0Patent Application Number
105837190
Date Filed
December 23, 2004
0Official Website
Patent Primary Examiner
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US Patent 07794610 Optical components and production thereof
Infobox
Is a
Patent jurisdiction
Patent number
07794610
Date of patent
September 14, 2010
Patent application number
10583719
Date Filed
December 23, 2004
Patent primary examiner
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