Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Thierry Enot0
Claire Divoux0
Marie-Helene Vaudaine0
Date of Patent
September 14, 2010
0Patent Application Number
105837190
Date Filed
December 23, 2004
0Patent Primary Examiner
Patent abstract
The invention relates to a method for making an actuation system for an optical component comprising:etching of a first face of a component, to form pads on it,etching of a second face of the component, to expose a membrane made of the same material as the pads,production of the actuation means of the pads and the membrane.
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