US Patent 7785060 Multi-directional mechanical scanning in an ion implanter
Patent 7785060 was granted and assigned to Applied Materials on August, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 27, 2006
Date of Patent
August 31, 2010
Patent Application Number
11588432
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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