US Patent 7785060 Multi-directional mechanical scanning in an ion implanter

Patent 7785060 was granted and assigned to Applied Materials on August, 2010 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Applied Materials

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7785060

Date of Patent

August 31, 2010

Patent Application Number

11588432

Date Filed

October 27, 2006

Patent Primary Examiner

‌

Bernard E Souw

Patent abstract

A scanning arm assembly for multi-directional mechanical scanning of a semiconductor wafer or other substrate to be implanted includes a pair of drive arms connected by two linkage arms to form a quadrilateral. Rotary joints are provided to join adjacent arms together, and a substrate holder is provided on one linkage arm where it joins the other linkage arm. Thus, rotating the drive arms causes the substrate holder to move. Suitable control of the drive arms allows the substrate holder to be moved through an ion beam to follow many different paths and hence implant patterns.