US Patent 7784915 MEMS device with nanocrystalline heater
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Patent abstract
A MEMS vapor bubble generator with a chamber for holding liquid and a heater positioned in the chamber for heating the liquid above its bubble nucleation point to form a vapor bubble; wherein,the heater has a microstructure with a grain size less than 100 nanometers.
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US Patent 07784915 MEMS device with nanocrystalline heater US Patent 7784915 MEMS device with nanocrystalline heater
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Patent Number
0778491500
Patent Number
778491500
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Patent Jurisdiction
Patent Number
077849150
Date of Patent
August 31, 2010
0Patent Application Number
114829770
Date Filed
July 10, 2006
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
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Infobox
Is a
Patent Jurisdiction
Patent Number
077849150
Date of Patent
August 31, 2010
0Patent Application Number
114829770
Date Filed
July 10, 2006
0Official Website
Patent Primary Examiner
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US Patent 07784915 MEMS device with nanocrystalline heater
Infobox
Is a
Patent jurisdiction
Patent number
07784915
Date of patent
August 31, 2010
Patent application number
11482977
Date Filed
July 10, 2006
Patent primary examiner
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