Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 31, 2010
Patent Application Number
11482977
Date Filed
July 10, 2006
Patent Primary Examiner
Patent abstract
A MEMS vapor bubble generator with a chamber for holding liquid and a heater positioned in the chamber for heating the liquid above its bubble nucleation point to form a vapor bubble; wherein,the heater has a microstructure with a grain size less than 100 nanometers.
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