US Patent 7736558 Imprint manufacture method
Patent 7736558 was granted and assigned to Hitachi Maxell on June, 2010 by the United States Patent and Trademark Office.
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Patent abstract
Provided is an imprint method that includes the steps of softening resist in an object to be processed, by using compressed gas or supercritical fluid, the object including a substrate and the resist applied onto the substrate, and transferring a predetermined pattern onto the resist by pressing a mold that forms the predetermined pattern against the resist in the object.
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Patent Inventor Names
Atsushi Yusa0
Toshinori Sugiyama0
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US Patent 07736558 Imprint manufacture method US Patent 7736558 Imprint manufacture method
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Patent Number
077365580
Patent Number
77365580
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Official Website
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Is a
Current Assignee
Patent Jurisdiction
Patent Number
077365580
Date of Patent
June 15, 2010
0Patent Application Number
107519740
Date Filed
January 7, 2004
0Official Website
Patent Primary Examiner
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US Patent 07736558 Imprint manufacture method
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07736558
Date of patent
June 15, 2010
Patent application number
10751974
Date Filed
January 7, 2004
Patent primary examiner
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