Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Toshinori Sugiyama0
Atsushi Yusa0
Date of Patent
June 15, 2010
0Patent Application Number
107519740
Date Filed
January 7, 2004
0Patent Primary Examiner
Patent abstract
Provided is an imprint method that includes the steps of softening resist in an object to be processed, by using compressed gas or supercritical fluid, the object including a substrate and the resist applied onto the substrate, and transferring a predetermined pattern onto the resist by pressing a mold that forms the predetermined pattern against the resist in the object.
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