US Patent 7718255 Cleaning sheets and method of cleaning with the same
Patent 7718255 was granted and assigned to Nitto Denko on May, 2010 by the United States Patent and Trademark Office.
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Patent abstract
The invention provides cleaning sheets for use in cleaning, e.g., various substrate-processing apparatus, systems for conveying exposure masks (reticles) in microfabrication, etc., and a method of cleaning these with the cleaning sheets. A cleaning sheet which comprises a sheet material comprising a thermoset resin layer having porosity and, formed on one side of the sheet material, a pressure-sensitive adhesive layer comprising a thermoplastic resin.
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Patent Inventor Names
Makoto Namikawa0
Yoshio Terada0
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US Patent 07718255 Cleaning sheets and method of cleaning with the same US Patent 7718255 Cleaning sheets and method of cleaning with the same
Infobox
Patent Number
077182550
Patent Number
77182550
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Official Website
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
077182550
Date of Patent
May 18, 2010
0Patent Application Number
106426520
Date Filed
August 19, 2003
0Official Website
Patent Primary Examiner
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US Patent 07718255 Cleaning sheets and method of cleaning with the same
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07718255
Date of patent
May 18, 2010
Patent application number
10642652
Date Filed
August 19, 2003
Patent primary examiner
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