US Patent 7718255 Cleaning sheets and method of cleaning with the same

Patent 7718255 was granted and assigned to Nitto Denko on May, 2010 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Nitto Denko

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

77182550

Patent Inventor Names

Yoshio Terada0

Makoto Namikawa0

Date of Patent

May 18, 2010

Patent Application Number

106426520

Date Filed

August 19, 2003

Patent Primary Examiner

‌

Arti Singh-Pandey

Patent abstract

The invention provides cleaning sheets for use in cleaning, e.g., various substrate-processing apparatus, systems for conveying exposure masks (reticles) in microfabrication, etc., and a method of cleaning these with the cleaning sheets. A cleaning sheet which comprises a sheet material comprising a thermoset resin layer having porosity and, formed on one side of the sheet material, a pressure-sensitive adhesive layer comprising a thermoplastic resin.