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US Patent 7684543 X-ray beam conditioning device and X-ray analysis apparatus

Patent 7684543 was granted and assigned to Rigaku on March, 2010 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
Current Assignee
Rigaku
Rigaku
Date Filed
June 29, 2006
Date of Patent
March 23, 2010
Patent Application Number
11476888
Patent Citations Received
‌
US Patent 11781999 Spot-size control in reflection-based and scatterometry-based X-ray metrology systems
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7684543
Patent Primary Examiner
‌
Edward J. Glick

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